First, the application background:
Magnetron sputtering is a secondary sputtering of a magnetron mode of operation. This technology is widely used in coating equipment, it is not only suitable for a wide range of coating targets (such as: copper, titanium, chrome, stainless steel, nickel and other metal materials), but also greatly enhance the film layer when coating Focus, repeatability, density and uniformity.
The magnetron sputtering coating equipment mainly uses DC magnetron sputtering, which often requires two output DC power supplies. After setting a voltage value, it is required to respond quickly to the set value of the voltage. The power supply must be stable during use and the voltage value cannot be affected by the load. However, the switching power supply commonly used in the market is open-loop control, which cannot ensure stable output, and a stable voltage is very important for the coating quality. Therefore, it is envisaged to realize the power supply by using the PID algorithm of the PLC and using the existing DC switching power supply. Quick adjustment and closed loop management.
As shown in the figure below, 4AI is needed to detect the current signal and voltage signal of the two DC stabilized power supply on the intelligent power control system as the feedback signal of the intelligent power supply; 2AO is needed to control the voltage output, so that the power supply has good load characteristics. , keep the constant voltage output.
In order to meet the above requirements, PLC selects the S20M0T switch and analog hybrid host of the sea, the host comes with 4 AI analog linear inputs, 2 AO analog linear outputs, analog supports engineering quantities, AI\AQ register Can be directly accessed, very convenient in analog signal processing, saving a lot of programming time; the host also supports 32-channel PID instructions; more importantly, a host is fixed, no need to add additional expansion modules, economical.
The commonly used switching power supply in the market is open-loop control, which can not ensure stable output, and a stable voltage is very important for the coating quality. Therefore, it is envisaged to use the existing PID switching power supply to realize the power supply through the PLC PID algorithm. Quick adjustment and closed loop management.
Figure 1 front view of the chassis
Figure 2 internal circuit
Figure 3 PLC
Figure 4 touch screen interface
The commonly used switching power supply in the market is open-loop control, which can not ensure stable output, and a stable voltage is very important for the coating quality. Therefore, it is envisaged to use the existing PID switching power supply to realize the power supply through the PLC PID algorithm. Quick adjustment and closed loop management.
Figure 5 touch screen interface
Figure 6 chassis back
Figure 7 analog load resistance
The PID instruction, that is, the PID instruction in the special control instruction, is supported by the full range of PLCs. According to the change of load, the system adjusts the parameters in combination with the real-time curve table provided by the software during online monitoring, and adjusts the three parameters of PID one by one to achieve the best effect. After the parameters are debugged and adjusted, the voltage is quickly adjusted and stabilized, and the closed-loop management of the power supply is realized, which provides a good foundation for better magnetron sputtering coating.
The first time I used the sea as a PLC, I felt that the programming software was very user-friendly and easy to use.
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