Northern microelectronics 12-inch 28 nm plasma silicon etching machine came out

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Recently, it was learned from Beijing Electronic Control that the 12-inch 28-nanometer plasma silicon etching machine independently developed by its subsidiary North Microelectronics Co., Ltd. has passed the process verification. China's integrated circuit high-end equipment has further accelerated the pace of catching up with the international level, and the technical level has been shortened from the "20-year gap" in 2003 to "only 3 years."

The Beijing-made etching machine passes the process "big test" only 12 inches and 28 nanometers.

There is a small integrated circuit chip on the mobile phone that people can't live without. The various lines on the chip are carved out by the etching machine. Recently, it was learned from Beijing Electronic Control that the 12-inch 28-nanometer plasma silicon etching machine independently developed by its subsidiary North Microelectronics Co., Ltd. has passed the process verification. China's integrated circuit high-end equipment has further accelerated the pace of catching up with the international level, and the technical level has been shortened from the "20-year gap" in 2003 to "only 3 years."

28 nanometers, equivalent to one ten thousandth of the thickness of a human hair. The production of electronic chips for a mobile phone generally requires 18 kinds of machines and equipment, and has accumulated more than 400 processes. The etching machine is one of the important devices.

At the end of last year, the 12-inch 28-nanometer plasma silicon etching machine independently developed by Northern Microelectronics Co., Ltd. passed the full process verification of SMIC's production line and obtained customer orders, marking the newization of China's integrated circuit high-end equipment localization. breakthrough.

Before Northern Microelectronics broke through the 28-nanometer etching technology, only one company in the United States and Japan could provide mature equipment that meets the 28-nanometer production line. For a long time, high-end etching equipment has always been a bottleneck restricting the development of China's integrated circuit industry. Therefore, Northern Microelectronics has introduced 28-nanometer silicon etching equipment to the market, marking China's first realization and mainstream in the field of high-end integrated circuit equipment. The demand for the production line is synchronized.

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